Ultrapure Water System for Microchip Manufacturing
AMI custom engineered water treatment system to supply ultrapure water for use in rinse water for microchip manufacturing in Hua Yue Microelectronics in China. Installation includes 2-pass reverse osmosis and microfiltration system and is complete with pretreatment, ozone, degassifiers, ultraviolet disinfection, and mixed bed deionization.
Technologies Used
- Ozone
- Hydrocyclone
- Media Filtration
- Reverse Osmosis
- Membrane Degassifiers
- Mixed Bed DI
- Ultraviolet Disinfection
- Microfiltration
Special Features
- 2-Pass RO Systems
- Product water requirements: Resistivity = 17.5 megaohms/cm; TOC < 100 ppb; DO2 < 100 ppb; SiO2 < 5 ppb; Microorganisms < 50/100 mL
- PVDF Piping
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